- High volume SS cube chamber for coating and deposition with slide rail door system front and back end with pneumatic cylinders for lid capturing and sealing, heated door, and turntable. Turntable to interface with a V-rail system inside chamber
- Roller rack carts with 30 expanded 304 stainless steel trays, including include supports to reduce flexing upon load
- Insulated vaporization SS cube chamber with external heated walls and internal heated aluminum platen with cooling channels for water or air cooling and chiller for fast cooling of platen
- High volume, double-door degas chamber with aluminum frame stand, leveling feet for interfacing with system frame, slide doors with pneumatic closures, and V-rail system
- Flat-rail system for roller cart movement
- Insulated pyrolization chamber with 4-zone heating to 600 °C and quartz liner
- Chambers and vacuum system designed and vacuum rated to 10-3 Torr.
Vacuum Chamber:
| 34" Cube / 304 SS with slide rail door system
|
Vaporization Chamber:
| 304 SS with hinged door and heated walls
|
Degas Chamber:
| 304 SS, Double-door cube with slide rail door system
|
Pyrolization Chamber:
| 8" DIA x 48" SS furnace
|
Vacuum Assembly:
| - W2V150, two-stage 53 cfm pump with oversized oil mist filter for degas chamber
- Alcatel Roots Blower Package RSV301B with 2063SD Vacuum pump for coating Chamber
- W2V40, two-stage 14 cfm pump with oil mist filter for vapor chamber
|
Controller:
| Customer-supplied PLC
|
No accessories available.
