- High volume coating and deposition chamber with flat rail system, turntable and manual pins for locking roller cart
- Roller rack carts with 30 expanded 304 stainless steel trays, including include supports to reduce flexing upon load.
- Insulated vaporization chamber with external heated walls (clam shell heaters) and internal heated aluminum platen with cooling channels for water or air cooling and chiller for fast cooling of platen.
- High volume degas chamber with aluminum frame stand with leveling feet for interfacing with system frame
- Flat-rail system for roller cart movement
- Insulated pyrolization chamber with single zone heating to 600 °C
Vacuum Chamber:
| 34" 304 SS cube
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Vaporization Chamber:
| 18" DIA X 20" L 304 SS with hinged door and heated walls
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Degas Chamber:
| 34" 304 SS cube with flat rail system
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Pyrolization Chamber:
| 8" DIA x 55" SS furnace
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Vacuum Assembly
| - W2V150, two-stage 53 cfm pump with oversized oil mist filter for degas chamber
- Alcatel Roots Blower Package RSV301B with 2063SD Vacuum pump for coating Chamber
- W2V40, two-stage 14 cfm pump with oil mist filter for vapor chamber
|
Controller:
| Customer-supplied PLC
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No accessories available.